Compatible Spare Parts & KitsEbara
High-quality spare parts compatible with Ebara dry vacuum pumps widely used in semiconductor manufacturing. Covers EV-S, EV-A, and PDV series claw and screw dry pumps.
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Compatible Series & Components
Claw pump parts: EV-S, EV-A series
Screw pump parts: PDV series
Mechanical seals and bearings
Nitrogen purge components
Complete overhaul kits
Branded packaging available
Typical Customers
Ebara pump service and overhaulSemiconductor fab maintenanceCost reduction programmes