Compatible Spare Parts & KitsULVAC
High-quality spare parts compatible with ULVAC rotary vane and dry vacuum pumps. Covers GLD, GHD, PTS, and DAP series commonly used in semiconductor and flat-panel display manufacturing.
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Compatible Series & Components
Rotary vane kits: GLD, GHD series
Dry pump parts: DAP series
Mechanical seals, vanes, bearings
Oil separator and filter elements
Complete overhaul kits
Branded packaging available
Typical Customers
ULVAC pump service and overhaulSemiconductor and FPD facility maintenanceCost reduction programmes